... large scale integrated circuit 大规模集成电路 large scale metrology 大尺寸测量法 large screen disply 大屏幕显示 ...
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Deep and systematical research on optical methods of large-scale metrology is performed after analysis and comparison of present measuring principles and technologies.
本文在详细地分析和比较了现有各种测量原理和技术的前提下，就大尺寸光学测量方法进行了深入系统地研究。
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